Probing the Atomic-Scale Structure of Amorphous Aluminum Oxide Grown by Atomic Layer Deposition
نویسندگان
چکیده
منابع مشابه
Atomic Layer Deposition of Aluminum Oxide
I Acknowledgements II Dedication III List of Figures V
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ژورنال
عنوان ژورنال: ACS Applied Materials & Interfaces
سال: 2020
ISSN: 1944-8244,1944-8252
DOI: 10.1021/acsami.0c01905